Generation of Coherent Extreme Ultraviolet Radiation in an Air Gas Cell with a High Power Femtosecond Laser System

2021 ◽  
Author(s):  
Muhammed Sayrac
Keyword(s):  
Femtosecond Laser ◽  
Ultraviolet Radiation ◽  
High Power ◽  
Extreme Ultraviolet ◽  
Laser System ◽  
Gas Cell ◽  
High Power Femtosecond Laser ◽  
Extreme Ultraviolet Radiation

Development of hybrid (solid/gas state) ultra-high power femtosecond laser system on the basis of XeF(C-A) amplifier

2011 ◽  
Vol 19 (2) ◽  
pp. 252-259 ◽  
Author(s):  
LOSEV V LOSEV V ◽  
ALEKSEEV S ALEKSEEV S ◽  
IVANOV N IVANOV N ◽  
KOVALCHUK B KOVALCHUK B ◽  
MIKHEEV L MIKHEEV L ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
High Power ◽  
Laser System ◽  
High Power Femtosecond Laser

Coherent continuum extreme ultraviolet radiation in the sub-100-nJ range generated by a high-power many-cycle laser field

2009 ◽  
Vol 34 (11) ◽  
pp. 1732 ◽  
Author(s):  
E. Skantzakis ◽  
P. Tzallas ◽  
J. Kruse ◽  
C. Kalpouzos ◽  
D. Charalambidis
Keyword(s):  
Ultraviolet Radiation ◽  
High Power ◽  
Laser Field ◽  
Extreme Ultraviolet ◽  
Extreme Ultraviolet Radiation

Generation of high flux, highly coherent extreme ultraviolet radiation in a gas cell

2008 ◽  
Vol 104 (2) ◽  
pp. 023105 ◽  
Author(s):  
Lap Van Dao ◽  
Sven Teichmann ◽  
Jeff Davis ◽  
Peter Hannaford
Keyword(s):  
Ultraviolet Radiation ◽  
Extreme Ultraviolet ◽  
High Flux ◽  
Gas Cell ◽  
Extreme Ultraviolet Radiation

Hybrid high power femtosecond laser system

2006 ◽  
Author(s):  
V. I. Trunov ◽  
V. V. Petrov ◽  
E. V. Pestryakov ◽  
A. V. Kirpichnikov
Keyword(s):  
Femtosecond Laser ◽  
High Power ◽  
Laser System ◽  
High Power Femtosecond Laser

Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection

2018 ◽  
Vol 189 (03) ◽  
pp. 323-334 ◽  
Author(s):  
D.B. Abramenko ◽  
P.S. Antsiferov ◽  
D.I. Astakhov ◽  
Aleksandr Yu. Vinokhodov ◽  
Il'ya Yu. Vichev ◽  
...  
Keyword(s):  
Ultraviolet Radiation ◽  
Extreme Ultraviolet ◽  
Mask Inspection ◽  
Extreme Ultraviolet Radiation
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