Determination of the saturation vapor pressure of silicon by Knudsen cell mass spectrometry

2012 ◽  
Vol 57 (2) ◽  
pp. 219-225 ◽  
Author(s):  
S. I. Lopatin ◽  
V. L. Stolyarova ◽  
V. G. Sevast’yanov ◽  
P. Ya. Nosatenko ◽  
V. V. Gorskii ◽  
...  
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