Evolution of Etch Profile of Magnetic Tunnel Junction Stacks Etched in a CH3OH/Ar Plasma
2012 ◽
Vol 159
(3)
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pp. H230-H234
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2012 ◽
Vol 1
(5)
◽
pp. P233-P236
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2011 ◽
Vol 11
(7)
◽
pp. 6616-6620
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