21120 Plasmon-Assisted Field emitter Array for High Throughput Electron Beam Lithography

2014 ◽  
Vol 2014.20 (0) ◽  
pp. _21120-1_-_21120-2_
Author(s):  
Takahiro OKANO ◽  
Kentaro IWAMI ◽  
Norihiro UMEDA
Keyword(s):  
Electron Beam ◽  
High Throughput ◽  
Electron Beam Lithography ◽  
Field Emitter ◽  
Emitter Array ◽  
Field Emitter Array

Direct bonding between spacer and field emitter array using an electron-beam-evaporated interlayer

1997 ◽  
Author(s):  
Heung-Woo Park ◽  
Byeong-Kwon Ju ◽  
Yun-Hi Lee ◽  
In-Byeong Kang ◽  
Noel D. Samaan ◽  
...  
Keyword(s):  
Electron Beam ◽  
Field Emitter ◽  
Emitter Array ◽  
Field Emitter Array

Submicron poly-Si gate Si field-emitter array for generation of a collimated electron beam

2003 ◽  
Vol 21 (4) ◽  
pp. 1594 ◽  
Author(s):  
Hidetaka Shimawaki ◽  
Syunpei Shibuya ◽  
Hidenori Mimura ◽  
Kuniyoshi Yokoo
Keyword(s):  
Electron Beam ◽  
Field Emitter ◽  
Emitter Array ◽  
Field Emitter Array

Fabrication of field emitter array using focused ion and electron beam induced reaction

1998 ◽  
Vol 41-42 ◽  
pp. 453-456 ◽  
Author(s):  
M. Takai ◽  
T. Kishimoto ◽  
H. Morimoto ◽  
Y.K. Park ◽  
S. Lipp ◽  
...  
Keyword(s):  
Electron Beam ◽  
Field Emitter ◽  
Emitter Array ◽  
Field Emitter Array ◽  
Induced Reaction

Maskless fabrication of field-emitter array by focused ion and electron beam

2000 ◽  
Vol 76 (22) ◽  
pp. 3319-3321 ◽  
Author(s):  
O. Yavas ◽  
C. Ochiai ◽  
M. Takai ◽  
A. Hosono ◽  
S. Okuda
Keyword(s):  
Electron Beam ◽  
Field Emitter ◽  
Emitter Array ◽  
Field Emitter Array

Fabrication of the Field Emitter Array with a Built-in Suppressor Gate

2011 ◽  
Vol 222 ◽  
pp. 209-212
Author(s):  
Yasuo Takagi ◽  
Akifumi Koike ◽  
Takahiro Fujino ◽  
Toru Aoki ◽  
Y. Neo ◽  
...  
Keyword(s):  
Electron Beam ◽  
Emission Angle ◽  
Gate Electrode ◽  
Field Emitter ◽  
Emitter Array ◽  
Field Emitter Array

To realize a fine focused electron beam less than several ten nm in diameter, the initial emission angle must be narrowed as much as possible. To control the initial emission angle, we have introduced a suppressor gate below the extractor gate electrode. The paper describes the fabrication of the field emitter array with a built-in suppressor gate.

Field emitter array fabricated using focused ion and electron beam induced reaction

2000 ◽  
Vol 18 (2) ◽  
pp. 976 ◽  
Author(s):  
O. Yavas ◽  
C. Ochiai ◽  
M. Takai ◽  
Y. K. Park ◽  
C. Lehrer ◽  
...  
Keyword(s):  
Electron Beam ◽  
Field Emitter ◽  
Emitter Array ◽  
Field Emitter Array ◽  
Induced Reaction
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