TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)

A high-performance dipole surface drive for large travel and force

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) ◽

10.1109/sensor.2003.1395506 ◽

2005 ◽

Cited By ~ 10

Author(s):

S. Hoen ◽

Q. Bai ◽

J.A. Harley ◽

D.A. Horsley ◽

F. Matta ◽

...

Keyword(s):

High Performance

Surface modification technology for bio-MEMS

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) ◽

10.1109/sensor.2003.1217123 ◽

2004 ◽

Author(s):

Dong-Sik Shin ◽

Chan-Ku Kang ◽

Jae-Kwon Kim ◽

Woo-Jae Chung ◽

Ki-Hoon Jang ◽

...

Keyword(s):

Surface Modification

Tapping-mode HF nanometric lateral gap resonators: experimental and theory

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) ◽

10.1109/sensor.2003.1215615 ◽

2004 ◽

Cited By ~ 2

Author(s):

E. Quevy ◽

B. Legrand ◽

D. Collard ◽

L. Buchaillot

Keyword(s):

Tapping Mode

Liquid packaging for MEMS sensors and RF devices

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) ◽

10.1109/sensor.2003.1217145 ◽

2004 ◽

Cited By ~ 1

Author(s):

P.A. Stupar ◽

R.L. Borwick ◽

J. DeNatale

Keyword(s):

Mems Sensors ◽

Rf Devices

Micro-jet nozzle array for precise droplet metering and steering having increased droplet deflection

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) ◽

10.1109/sensor.2003.1215330 ◽

2004 ◽

Cited By ~ 3

Author(s):

C.N. Anagnostopoulos ◽

J.M. Chwalek ◽

C.N. Delametter ◽

G.A. Hawkins ◽

D.L. Jeanmaire ◽

...

Keyword(s):

Jet Nozzle

Novel on-chip microfluidic transport system with electrochemically controlled bubble formation

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) ◽

10.1109/sensor.2003.1215551 ◽

2004 ◽

Author(s):

H. Suzuki ◽

R. Yoneyama

Keyword(s):

Transport System ◽

Bubble Formation ◽

On Chip

A drive comb-drive actuator with large, stable deflection range for use as an optical shutter

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) ◽

10.1109/sensor.2003.1215380 ◽

2004 ◽

Cited By ~ 1

Author(s):

J.D. Grade ◽

K.Y. Yasumura ◽

H. Jerman

Keyword(s):

Comb Drive ◽

Optical Shutter

Digital deflection micromirrors for adaptive optics applications

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) ◽

10.1109/sensor.2003.1215386 ◽

2004 ◽

Cited By ~ 2

Author(s):

Guangya Zhou ◽

V.J. Logeeswaran ◽

F.E.H. Tay ◽

Fook Siong Chau

Keyword(s):

Adaptive Optics

Lithographic approach to pattern multiple nanoparticle thin films prepared by Layer-by-Layer self-assembly for microsystems

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) ◽

10.1109/sensor.2003.1215579 ◽

2004 ◽

Author(s):

Tianhong Cui ◽

Y. Lvov ◽

Feng Hua ◽

Jingshi Shi

Keyword(s):

Thin Films ◽

Self Assembly ◽

Layer By Layer

Protruding microgripper with force amplification and parallel jaw motion for in-situ sample manipulation in SEM and FIB-machines

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) ◽

10.1109/sensor.2003.1215304 ◽

2004 ◽

Cited By ~ 2

Author(s):

G. Krijnen ◽

R. Haanstra ◽

E. Potters ◽

J.W. Berenschot ◽

S. von Harrach ◽

...

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)
Latest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

A high-performance dipole surface drive for large travel and force

Surface modification technology for bio-MEMS

Tapping-mode HF nanometric lateral gap resonators: experimental and theory

Liquid packaging for MEMS sensors and RF devices

Micro-jet nozzle array for precise droplet metering and steering having increased droplet deflection

Novel on-chip microfluidic transport system with electrochemically controlled bubble formation

A drive comb-drive actuator with large, stable deflection range for use as an optical shutter

Digital deflection micromirrors for adaptive optics applications

Lithographic approach to pattern multiple nanoparticle thin films prepared by Layer-by-Layer self-assembly for microsystems

Protruding microgripper with force amplification and parallel jaw motion for in-situ sample manipulation in SEM and FIB-machines

Export Citation Format

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)Latest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

A high-performance dipole surface drive for large travel and force

Surface modification technology for bio-MEMS

Tapping-mode HF nanometric lateral gap resonators: experimental and theory

Liquid packaging for MEMS sensors and RF devices

Micro-jet nozzle array for precise droplet metering and steering having increased droplet deflection

Novel on-chip microfluidic transport system with electrochemically controlled bubble formation

A drive comb-drive actuator with large, stable deflection range for use as an optical shutter

Digital deflection micromirrors for adaptive optics applications

Lithographic approach to pattern multiple nanoparticle thin films prepared by Layer-by-Layer self-assembly for microsystems

Protruding microgripper with force amplification and parallel jaw motion for in-situ sample manipulation in SEM and FIB-machines

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)
Latest Publications