424 3-dimentional microstructures produced by the combination of high aspect ratio processing using synchrotron radiation and anisotropic etching
2001 ◽
Vol 2001.9
(0)
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pp. 369-370
2011 ◽
Vol 115
(33)
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pp. 16258-16267
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Keyword(s):
2002 ◽
Vol 10.2
(0)
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pp. 585-588