Fabrication of high-aspect-ratio precision MEMS with LIGA using synchrotron radiation
2002 ◽
Vol 10.2
(0)
◽
pp. 585-588
2001 ◽
Vol 2001.9
(0)
◽
pp. 369-370
1996 ◽
Vol 35
(Part 2, No. 2A)
◽
pp. L186-L188
◽