scholarly journals 3D Micro-Fabrication using Combination Technique of Nano-Scale Processing and Chemical Etching(1st Report, Possibility of 3D Micro-Fabrication using the Mechanism of Friction Force Microscope)

2004 ◽  
Vol 70 (696) ◽  
pp. 2533-2540 ◽  
Author(s):  
Noritaka KAWASEGI ◽  
Noboru MORITA ◽  
Shigeru YAMADA ◽  
Noboru TAKANO ◽  
Tatsuo OYAMA ◽  
...  
Keyword(s):  
Friction Force ◽  
Chemical Etching ◽  
Micro Fabrication ◽  
Combination Technique ◽  
Nano Scale ◽  
Friction Force Microscope

scholarly journals 3D Micro-Fabrication using Combination Technique of Nano-scale Processing and Chemical Etching (4th Report, Mechanism of Masking Effect)

2005 ◽  
Vol 71 (706) ◽  
pp. 2035-2040 ◽  
Author(s):  
Noritaka KAWASEGI ◽  
Noboru MORITA ◽  
Shigeru YAMADA ◽  
Noboru TAKANO ◽  
Tatsuo OYAMA ◽  
...  
Keyword(s):  
Chemical Etching ◽  
Masking Effect ◽  
Micro Fabrication ◽  
Combination Technique ◽  
Nano Scale
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