Facing the problems of ohmic loss and short propagation length, the application of plasmonic waveguides is limited. Here, a triangle hybrid plasmonic waveguide is introduced, where a cylinder silicon waveguide is separated from the triangle prism silver waveguide by a nanoscale silica gap. The process of constant optimization of waveguide structure is completed and simulation results indicate that the propagation length could reach a length of 510 μm, and the normalized mode area could reach 0.03 along with a high figure of merit 3150. This implies that longer propagation length could be simultaneously achieved along with relatively ultra-deep subwavelength mode confinement due to the hybridization between metallic plasmon polarization mode and silicon waveguide mode, compared with previous study. By an analysis of fabrication errors, it is confirmed that this waveguide is fairly stable over a wide error range. Additionally, the excellent performance of this is further proved by the comparison with other hybrid plasmonic waveguides. Our work is significant to manipulate light waves at sub-wavelength dimensions and enlarge the application fields, such as light detection and photoelectric sensors, which also benefit the improvement of the integration of optical devices.
Polarization rotation and coupling between silicon waveguide and hybrid plasmonic waveguide