Heterodyne period measurement in a scanning beam interference lithography system

2020 ◽  
Vol 59 (19) ◽  
pp. 5830
Author(s):  
Shan Jiang ◽  
Bo Lü ◽  
Ying Song ◽  
Zhaowu Liu ◽  
Wei Wang ◽  
...  
Keyword(s):  
Interference Lithography ◽  
Scanning Beam ◽  
Scanning Beam Interference Lithography ◽  
Lithography System ◽  
Period Measurement

Effect of Measured Interference Fringe Period Error on Groove Profile of Grating Masks in Scanning Beam Interference Lithography System

2014 ◽  
Vol 34 (4) ◽  
pp. 0405003 ◽  
Author(s):  
姜珊 Jiang Shan ◽  
巴音贺希格 Bayanheshig ◽  
宋莹 Song Ying ◽  
潘明忠 Pan Mingzhong ◽  
李文昊 Li Wenhao
Keyword(s):  
Interference Fringe ◽  
Interference Lithography ◽  
Scanning Beam ◽  
Groove Profile ◽  
Scanning Beam Interference Lithography ◽  
Lithography System

Beam Alignment Error and Its Control in Scanning Beam Interference Lithography System

2017 ◽  
Vol 37 (7) ◽  
pp. 0722003
Author(s):  
王 玮 Wang Wei ◽  
巴音贺希格 Bayanheshig ◽  
潘明忠 Pan Mingzhong ◽  
宋 莹 Song Ying ◽  
李文昊 Li Wenhao
Keyword(s):  
Interference Lithography ◽  
Alignment Error ◽  
Scanning Beam ◽  
Scanning Beam Interference Lithography ◽  
Lithography System

Design of Spot Size and Optical Path in Scanning Beam Interference Lithography System

2017 ◽  
Vol 44 (9) ◽  
pp. 0905002
Author(s):  
王玮 Wang Wei ◽  
姜珊 Jiang Shan ◽  
宋莹 Song Ying ◽  
巴音贺希格 Bayanheshig
Keyword(s):  
Spot Size ◽  
Optical Path ◽  
Interference Lithography ◽  
Scanning Beam ◽  
Scanning Beam Interference Lithography ◽  
Lithography System

Status and Development of Scanning Beam Interference Lithography System

2015 ◽  
Vol 52 (10) ◽  
pp. 100001
Author(s):  
程伟林 Cheng Weilin ◽  
朱菁 Zhu Jing ◽  
张运波 Zhang Yunbo ◽  
曾爱军 Zeng Aijun ◽  
黄惠杰 Huang Huijie
Keyword(s):  
Interference Lithography ◽  
Scanning Beam ◽  
Scanning Beam Interference Lithography ◽  
Lithography System

Effect of Period Setting Value on Printed Phase in Scanning Beam Interference Lithography System

2014 ◽  
Vol 34 (9) ◽  
pp. 0905003 ◽  
Author(s):  
姜珊 Jiang Shan ◽  
巴音贺希格 Bayanheshig ◽  
李文昊 Li Wenhao ◽  
宋莹 Song Ying ◽  
潘明忠 Pan Mingzhong
Keyword(s):  
Interference Lithography ◽  
Scanning Beam ◽  
Scanning Beam Interference Lithography ◽  
Lithography System

Nanometer-accurate grating fabrication with scanning beam interference lithography

2002 ◽  
Author(s):  
Carl G. Chen ◽  
Paul T. Konkola ◽  
Ralf K. Heilmann ◽  
Chulmin Joo ◽  
Mark L. Schattenburg
Keyword(s):  
Interference Lithography ◽  
Grating Fabrication ◽  
Scanning Beam ◽  
Scanning Beam Interference Lithography
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