Correction of PZT scanner errors using phase compensation method in White Light Phase Shifting Interferometry

2021 ◽  
Author(s):  
Soonyang Kwon ◽  
Namyoon Kim
Keyword(s):  
White Light ◽  
Compensation Method ◽  
Phase Shifting ◽  
Light Phase ◽  
Phase Compensation ◽  
Phase Shifting Interferometry

Characterization of nanodefects in silicon wafers by white light phase shifting interferometry

2003 ◽  
Author(s):  
Ganesha Udupa ◽  
Bryan K. A. Ngoi ◽  
H. C. F. Goh ◽  
M. N. Yusoff ◽  
A. V. Patil
Keyword(s):  
White Light ◽  
Silicon Wafers ◽  
Phase Shifting ◽  
Light Phase ◽  
Phase Shifting Interferometry
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