scholarly journals Fringe-Order Determination Method in White-Light Phase-Shifting Interferometry for the Compensation of the Phase Delay and the Suppression of Excessive Phase Unwrapping

2013 ◽  
Vol 17 (5) ◽  
pp. 415-422 ◽  
Author(s):  
SeongRyong Kim ◽  
JungHwan Kim ◽  
HeuiJae Pahk
Keyword(s):  
White Light ◽  
Phase Unwrapping ◽  
Phase Delay ◽  
Phase Shifting ◽  
Determination Method ◽  
Fringe Order ◽  
Light Phase ◽  
Phase Shifting Interferometry ◽  
Order Determination

Characterization of nanodefects in silicon wafers by white light phase shifting interferometry

2003 ◽  
Author(s):  
Ganesha Udupa ◽  
Bryan K. A. Ngoi ◽  
H. C. F. Goh ◽  
M. N. Yusoff ◽  
A. V. Patil
Keyword(s):  
White Light ◽  
Silicon Wafers ◽  
Phase Shifting ◽  
Light Phase ◽  
Phase Shifting Interferometry
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