Improved near-field calculations using vectorial diffraction integrals in the finite-difference time-domain method

2011 ◽  
Vol 28 (8) ◽  
pp. 1776 ◽  
Author(s):  
Ryan L. Coe ◽  
Eric J. Seibel
Keyword(s):  
Finite Difference ◽  
Time Domain ◽  
Finite Difference Time Domain ◽  
Near Field ◽  
Time Domain Method ◽  
Domain Method ◽  
Difference Time

Simulation of near-field photolithography using the finite-difference time-domain method

2001 ◽  
Vol 89 (7) ◽  
pp. 3547-3553 ◽  
Author(s):  
Shuji Tanaka ◽  
Masayuki Nakao ◽  
Mariko Umeda ◽  
Kenchi Ito ◽  
Shigeru Nakamura ◽  
...  
Keyword(s):  
Finite Difference ◽  
Time Domain ◽  
Finite Difference Time Domain ◽  
Near Field ◽  
Time Domain Method ◽  
Domain Method ◽  
Difference Time
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