Fabrication of microfluidic systems with arbitrary 3D geometries inside fused silica using femtosecond laser direct writing

2012 ◽  
Author(s):  
Ya Cheng ◽  
Yang Liao ◽  
Fei He ◽  
Lingling Qiao ◽  
Zhizhan Xu
Keyword(s):  
Femtosecond Laser ◽  
Fused Silica ◽  
Direct Writing ◽  
Laser Direct Writing ◽  
Microfluidic Systems

Infrared Femtosecond Laser Direct-Writing Digital Volume Gratings in Fused Silica

2010 ◽  
Vol 27 (4) ◽  
pp. 044213 ◽  
Author(s):  
Wang Ying ◽  
Li Yu-Hua ◽  
Lu Pei-Xiang
Keyword(s):  
Femtosecond Laser ◽  
Fused Silica ◽  
Direct Writing ◽  
Laser Direct Writing ◽  
Volume Gratings

Waveguide electro-optic modulator in fused silica fabricated by femtosecond laser direct writing and thermal poling

2006 ◽  
Vol 31 (6) ◽  
pp. 739 ◽  
Author(s):  
Guangyu Li ◽  
Kim A. Winick ◽  
Ali A. Said ◽  
Mark Dugan ◽  
Philippe Bado
Keyword(s):  
Femtosecond Laser ◽  
Fused Silica ◽  
Direct Writing ◽  
Laser Direct Writing ◽  
Thermal Poling ◽  
Electro Optic ◽  
Electro Optic Modulator

scholarly journals Addressing the Fabrication Difficulties of Femtosecond Laser Written Surface Waveguides for Enhanced Evanescent Coupling

2019 ◽  
Vol 215 ◽  
pp. 15003
Author(s):  
Vítor A. Amorim ◽  
João M. Maia ◽  
Duarte Viveiros ◽  
P. V. S. Marques
Keyword(s):  
Femtosecond Laser ◽  
Optical Waveguides ◽  
Dielectric Medium ◽  
Fused Silica ◽  
Wet Etching ◽  
Aluminosilicate Glass ◽  
Direct Writing ◽  
Laser Direct Writing ◽  
Guided Mode ◽  
Evanescent Coupling

In this work, the fabrication of optical waveguides embedded in fused silica (Suprasil1) and boro-aluminosilicate glass (Eagle2000) is demonstrated with femtosecond laser direct writing, as well as their suitability to be brought to the surface, through wet etching, for enhanced evanescent coupling with the external dielectric medium. Fused silica demonstrated to be inappropriate in this particular application, as the guiding region is at the bottom of the induced modification, creating a barrier between the guided mode and the substrate’s boundary. Furthermore, the existence of nanogratings meant that, upon contact of the top of the induced modification with the substrate’s boundary, the waveguide is quickly etched. Eagle2000 demonstrated to be superior to fused silica due to its characteristic modification cross-section and absence of nanogratings, which allowed the placement of the guiding region as close to the substrate’s surface as required. However, surface roughness arising from the creation of insoluble products in the HF solution was found. The addition of HCl to dissolve these products was implemented.

Loss Mechanisms of Optical Waveguides Inscribed in Fused Silica by Femtosecond Laser Direct Writing

2019 ◽  
Vol 37 (10) ◽  
pp. 2240-2245 ◽  
Author(s):  
Vitor A. Amorim ◽  
Joao M. Maia ◽  
Duarte Viveiros ◽  
P. V. S. Marques
Keyword(s):  
Femtosecond Laser ◽  
Optical Waveguides ◽  
Fused Silica ◽  
Direct Writing ◽  
Laser Direct Writing ◽  
Loss Mechanisms

scholarly journals Monolithic Add–Drop Multiplexers in Fused Silica Fabricated by Femtosecond Laser Direct Writing

2017 ◽  
Vol 35 (17) ◽  
pp. 3615-3621 ◽  
Author(s):  
Vitor A. Amorim ◽  
Joao M. Maia ◽  
D. Alexandre ◽  
P. V. S. Marques
Keyword(s):  
Femtosecond Laser ◽  
Fused Silica ◽  
Direct Writing ◽  
Laser Direct Writing
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