Integrated Optical Switch Controlled with a MEMS Rotational Electrostatic Actuator
2012 ◽
Vol 249-250
◽
pp. 551-556
Keyword(s):
2005 ◽
Vol 11
(6)
◽
pp. 1248-1254
◽
2016 ◽
Vol 34
(18)
◽
pp. 4364-4375
◽
2013 ◽
Vol 712-715
◽
pp. 2210-2215
Keyword(s):
2005 ◽
Vol 48
(2)
◽
pp. 234
◽