Materials Compatibility with Nitrogen Trifluoride (NF

Flammability and Sensitivity of Materials in Oxygen-Enriched Atmospheres: 11th Volume ◽

10.1520/stp37664s ◽

2008 ◽

pp. 334-334-16

Author(s):

BE Newton ◽

GJA Chiffoleau

Keyword(s):

Nitrogen Trifluoride

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Kinetics Analysis of Reaction between Molybdenum and Nitrogen Trifluoride

Chinese Journal of Analytical Chemistry ◽

10.1016/s1872-2040(21)60094-4 ◽

2021 ◽

Vol 49 (4) ◽

pp. e21039-e21045

Author(s):

Yong-Sheng NIU ◽

Li-Xin SUN ◽

Cong-Wei HU ◽

Jin-Hao ZHOU ◽

Qiang DOU ◽

...

Keyword(s):

Kinetics Analysis ◽

Nitrogen Trifluoride

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Effects of nitrogen trifluoride on the growth and properties of plasma-enhanced chemical-vapor-deposited diamond-like carbon films

Journal of Electronic Materials ◽

10.1007/bf02661661 ◽

1993 ◽

Vol 22 (4) ◽

pp. 347-352 ◽

Author(s):

S. S. Ang ◽

G. Sreenivas ◽

W. D. Brown ◽

H. A. Naseem ◽

R. K. Ulrich

Keyword(s):

Chemical Vapor ◽

Carbon Films ◽

Diamond Like Carbon ◽

Nitrogen Trifluoride ◽

Chemical Vapor Deposited

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A new electrolytic production of nitrogen trifluoride in a molten CsFHFNH4F system

Journal of Fluorine Chemistry ◽

10.1016/s0022-1139(00)83543-5 ◽

1991 ◽

Vol 54 (1-3) ◽

pp. 33 ◽

Author(s):

A. Tasaka ◽

K. Mizuno ◽

K. Miki

Keyword(s):

Nitrogen Trifluoride ◽

Electrolytic Production

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Ab initio calculation of the anharmonic force and dipole fields of nitrogen trifluoride

Chemical Physics Letters ◽

10.1016/0009-2614(96)00526-x ◽

1996 ◽

Vol 257 (1-2) ◽

pp. 23-30 ◽

Author(s):

Riccardo Tarroni ◽

Paolo Palmieri ◽

Maria Luisa Senent ◽

Andrew Willetts

Keyword(s):

Ab Initio ◽

Ab Initio Calculation ◽

Nitrogen Trifluoride ◽

Anharmonic Force

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A review of nitrogen trifluoride for dry etching in microelectronics processing

Microelectronics Journal ◽

10.1016/s0026-2692(85)80121-x ◽

1985 ◽

Vol 16 (1) ◽

pp. 5-21 ◽

Author(s):

Bogdan Golja ◽

John A. Barkanic ◽

Andrew Hoff

Keyword(s):

Dry Etching ◽

Nitrogen Trifluoride

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Thermodynamic Properties of Nitrogen Trifluoride from 12°K to Its Boiling Point. The Entropy from Molecular and Spectroscopic Data

The Journal of Chemical Physics ◽

10.1063/1.1742028 ◽

1955 ◽

Vol 23 (3) ◽

pp. 551-555 ◽

Author(s):

Louis Pierce ◽

E. L. Pace

Keyword(s):

Thermodynamic Properties ◽

Boiling Point ◽

Spectroscopic Data ◽

Nitrogen Trifluoride

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ChemInform Abstract: EPR EVIDENCE ON MOLECULAR AND ELECTRONIC STRUCTURE OF NITROGEN TRIFLUORIDE RADICAL CATION

Chemischer Informationsdienst ◽

10.1002/chin.198339002 ◽

1983 ◽

Vol 14 (39) ◽

Author(s):

A. M. MAURICE ◽

R. L. BELFORD ◽

I. B. GOLDBERG ◽

K. O. CHRISTE

Keyword(s):

Electronic Structure ◽

Radical Cation ◽

Nitrogen Trifluoride ◽

Molecular And Electronic Structure

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ChemInform Abstract: Preparation of Tetrafluorohydrazine from Nitrogen Trifluoride with Iron or Iron(II) Fluoride.

10.1002/chin.200048013 ◽

2000 ◽

Vol 31 (48) ◽

pp. no-no ◽

Author(s):

Toshiyuki Takagi ◽

Masanori Tamura ◽

Motonari Shibakami ◽

Heng-dao Quan ◽

Akira Sekiya

Keyword(s):

Nitrogen Trifluoride

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Experimental values of the rotational and vibrational constants and equilibrium structure of nitrogen trifluoride

Journal of Molecular Spectroscopy ◽

10.1016/j.jms.2015.02.002 ◽

2015 ◽

Vol 312 ◽

pp. 1-5 ◽

Author(s):

Hamid Najib

Keyword(s):

Equilibrium Structure ◽

Nitrogen Trifluoride ◽

Experimental Values ◽

Vibrational Constants

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Synthesis of Nitrogen Trifluoride from the Elements

Inorganic Chemistry ◽

10.1021/ic50017a046 ◽

1964 ◽

Vol 3 (7) ◽

pp. 1063-1063 ◽

Author(s):

Walter Maya

Keyword(s):

Nitrogen Trifluoride

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