Effects of nitrogen trifluoride on the growth and properties of plasma-enhanced chemical-vapor-deposited diamond-like carbon films
1993 ◽
Vol 22
(4)
◽
pp. 347-352
◽
Keyword(s):
Keyword(s):
2001 ◽
Vol 78-79
◽
pp. 191-196
◽
1994 ◽
Vol 25
(1)
◽
pp. 67-73
◽
1994 ◽
Vol 23
(6)
◽
pp. 569-575
◽
Keyword(s):
2000 ◽
Vol 39
(Part 1, No. 4A)
◽
pp. 1866-1871
◽
2010 ◽
Vol 42
(12-13)
◽
pp. 1702-1705
◽
Keyword(s):
2013 ◽
Vol 52
(11R)
◽
pp. 110123
◽
Keyword(s):
Keyword(s):
2013 ◽
Vol 264
◽
pp. 625-632
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