Electromagnetically Driven 2-axis Optical Beam Steering MEMS Mirror and Its Dependence of Actuation on Magnetic Field
2010 ◽
Vol 130
(4)
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pp. 107-112
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2011 ◽
Vol 94
(11)
◽
pp. 24-31
◽
2007 ◽
Vol 270
(1)
◽
pp. 41-46
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