Tetragonal Phase in Ge Doped HfO2 Films on Si Investigated by X-ray Absorption Spectroscopy

2009 ◽  
Vol 1194 ◽  
Author(s):  
Leonardo Miotti ◽  
Karen Paz Bastos ◽  
Cláudio Radtke ◽  
Gerald Lucovsky

AbstractThe stabilization of the tetragonal phase of 5 nm thick HfO2 films by Ge doping is investigated using x-ray absorption spectroscopy around O and Ge Kedges and by Rutherford backscattering spectrometry. We show that Ge concentrations higher than ˜5at.% are not stable during rapid thermal anneal at temperatures as low as 750°C and that the tetragonal phase of HfO2 is achieved at this Ge concentration.

1986 ◽  
Vol 47 (C8) ◽  
pp. C8-237-C8-242 ◽  
Author(s):  
B. S. CLAUSEN ◽  
B. LENGELER ◽  
B. S. RASMUSSEN ◽  
W. NIEMANN ◽  
H. TOPSØE

1986 ◽  
Vol 47 (C8) ◽  
pp. C8-149-C8-151
Author(s):  
F. W. LYTLE ◽  
R. B. GREEGOR ◽  
G. H. VIA ◽  
J. M. BROWN ◽  
G. MEITZNER

1986 ◽  
Vol 47 (C8) ◽  
pp. C8-1155-C8-1157
Author(s):  
E. C. THEIL ◽  
D. E. SAYERS ◽  
C. Y. YANG ◽  
A. FONTAINE ◽  
E. DARTYGE

1986 ◽  
Vol 47 (C8) ◽  
pp. C8-555-C8-561 ◽  
Author(s):  
S. SAIGO ◽  
H. OYANAGI ◽  
T. MATSUSHITA ◽  
H. HASHIMOTO ◽  
N. YOSHIDA ◽  
...  

1983 ◽  
Vol 27 ◽  
Author(s):  
L. Salamanca-Riba ◽  
B.S. Elman ◽  
M.S. Dresselhaus ◽  
T. Venkatesan

ABSTRACTRutherford backscattering spectrometry (RBS) is used to characterize the stoichiometry of graphite intercalation compounds (GIC). Specific application is made to several stages of different donor and acceptor compounds and to commensurate and incommensurate intercalants. A deviation from the theoretical stoichiometry is measured for most of the compounds using this non-destructive method. Within experimental error, the RBS results agree with those obtained from analysis of the (00ℓ) x-ray diffractograms and weight uptake measurements on the same samples.


2019 ◽  
Author(s):  
Jisue Moon ◽  
Carter Abney ◽  
Dmitriy Dolzhnikov ◽  
James M. Kurley ◽  
Kevin A. Beyer ◽  
...  

The local structure of dilute CrCl<sub>3</sub> in a molten MgCl<sub>2</sub>:KCl salt was investigated by <i>in situ</i> x-ray absorption spectroscopy (XAS) at temperatures from room temperature to 800<sup>o</sup>C. This constitutes the first experiment where dilute Cr speciation is explored in a molten chloride salt, ostensibly due to the compounding challenges arising from a low Cr concentration in a matrix of heavy absorbers at extreme temperatures. CrCl<sub>3</sub> was confirmed to be the stable species between 200 and 500<sup>o</sup>C, while mobility of metal ions at higher temperature (>700<sup>o</sup>C) prevented confirmation of the local structure.


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