This paper presents a structural geometry for increasing piezoelectric deformation, which is suitable for both micro- and macro-scale applications. New and versatile microstructure geometries for actuators can improve device performance, and piezoelectric designs benefit from a high-frequency response, power density, and efficiency, making them a viable choice for a variety of applications. Previous works have presented piezoelectric structures capable of this amplification, but few are well-suited to planar manufacturing. In addition to this manufacturing difficulty, a large number of designs cannot be chained into longer elements, preventing them from operating at the macro-scale. By optimizing for both modern manufacturing techniques and composability, this structure excels as an option for a variety of macro- and micro-applications. This paper presents an analytical compact model of a novel dual-bimorph piezoelectric structure, and shows that this compact model is within 2% of a computer-distributed element model. Furthermore it compares the actuator’s theoretical performance to that of a modern actuator, showing that this actuator trades mechanical efficiency for compactness and weight savings.
SOME PROPERTIES OF SAW IN PIEZOELECTRIC STRUCTURES WITH INHOMOGENEOUS COATING
