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A WAFER-BONDED, FLOATING ELEMENT SHEAR-STRESS SENSOR USING A GEOMETRIC MOIRÈ OPTICAL TRANSDUCTION TECHNIQUE
2004 Solid-State, Actuators, and Microsystems Workshop Technical Digest
◽
10.31438/trf.hh2004.4
◽
2004
◽
Author(s):
S. Horowitz
◽
T.-A. Chen
◽
V. Chandrasekaran
◽
K. Tedjojuwono
◽
L. Cattafesta III
◽
...
Keyword(s):
Shear Stress
◽
Stress Sensor
◽
Shear Stress Sensor
◽
Floating Element
◽
Geometric Moiré
Download Full-text
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Temperature Drifts of The Floating Element Wall Shear Stress Sensor with Capacitive Sensing
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
◽
10.1109/transducers.2019.8808744
◽
2019
◽
Author(s):
Guanghui Ding
◽
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◽
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Micromachined Nickel Floating Element Shear Stress Sensor Array
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◽
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◽
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◽
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◽
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◽
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◽
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◽
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◽
Cited By ~ 3
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◽
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◽
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◽
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◽
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◽
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◽
10.1016/j.sna.2017.11.004
◽
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◽
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◽
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◽
Cited By ~ 1
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◽
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