CMOS-MEMS 8-BIT MEMDAC NANOPOSITIONER WITH INTEGRATED POSITION SENSING AND DIGITAL CONTROL
2010 ◽
Vol 58
(12)
◽
pp. 3961-3970
◽
1969 ◽
Vol 116
(5)
◽
pp. 873
◽
2018 ◽
Vol 138
(5)
◽
pp. 417-424
◽
2016 ◽
Vol 48
(12)
◽
pp. 27-36