Interferometric precision displacement measurement system based on diffraction grating

2017 ◽  
Vol 10 (1) ◽  
pp. 39-50 ◽  
Author(s):  
吕 强 LV Qiang ◽  
李文昊 LI Wen-hao ◽  
巴音贺希格 Bayanheshig ◽  
柏 杨 BAI Yang ◽  
刘兆武 LIU Zhao-wu ◽  
...  
Keyword(s):  
Measurement System ◽  
Diffraction Grating ◽  
Displacement Measurement

Six-degree-of-freedom displacement measurement system using a diffraction grating

2000 ◽  
Vol 71 (8) ◽  
pp. 3214-3219 ◽  
Author(s):  
Jong-Ahn Kim ◽  
Kyung-Chan Kim ◽  
Eui Won Bae ◽  
Soohyun Kim ◽  
Yoon Keun Kwak
Keyword(s):  
Measurement System ◽  
Diffraction Grating ◽  
Degree Of Freedom ◽  
Displacement Measurement ◽  
Six Degree Of Freedom

Multi-degree-of-freedom displacement measurement system using a diffraction grating

2000 ◽  
Author(s):  
Jong-Ahn Kim ◽  
Kyung-Chan Kim ◽  
Eui W. Bae ◽  
Soo Hyun Kim ◽  
Yoon Keun Kwak
Keyword(s):  
Measurement System ◽  
Diffraction Grating ◽  
Degree Of Freedom ◽  
Displacement Measurement

Dual interferometric displacement measurement system incorporating a Wollaston interferometer

1997 ◽  
Author(s):  
James E. Kemp ◽  
X. Q. Jiang ◽  
Yanong N. Ning ◽  
Andrew W. Palmer ◽  
Kenneth T. V. Grattan
Keyword(s):  
Measurement System ◽  
Displacement Measurement

A high-precision laser displacement measurement system

2021 ◽  
Author(s):  
Wenqing Pan ◽  
Dengwei Zhang ◽  
Cui Liang ◽  
Chao Ma ◽  
Xiaowu Shu ◽  
...  
Keyword(s):  
High Precision ◽  
Measurement System ◽  
Displacement Measurement
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