Comprehensive error modeling and compensation for optical free-form surface polishing machine tool
2015 ◽
Vol 23
(6)
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pp. 1587-1597
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Keyword(s):
2017 ◽
Vol 13
(4)
◽
pp. 371
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Keyword(s):
2004 ◽
Vol 259-260
◽
pp. 631-635
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Keyword(s):
2009 ◽
Vol 46
(1-4)
◽
pp. 21-29
◽
Keyword(s):
2010 ◽
Vol 59
(4)
◽
pp. 764-769
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