Comprehensive error modelling and error compensation for complex optical free-form surface polishing platform
2017 ◽
Vol 13
(4)
◽
pp. 371
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2015 ◽
Vol 23
(6)
◽
pp. 1587-1597
◽
Keyword(s):
Keyword(s):
2009 ◽
Vol 48
(9-12)
◽
pp. 905-912
◽
Keyword(s):
2012 ◽
Vol 472-475
◽
pp. 2125-2128
◽
Keyword(s):