Microfluidic Devices Fabricated by LTCC Combined with Thick Film Lithography
Keyword(s):
Low temperature co-fired ceramic (LTCC) process combined with thick film photolithography was employed to fabricate ceramic-based microfluidic devices. To check the applicability of novel process, three types of passive mixers, diffusion-driven T-type mixers with different channel width and convection-driven chaotic mixer, were fabricated and their microfluidic performance was evaluated. It was confirmed that the degree of mixing in ceramic-based microfluidic passive mixers was well matched with the numerical simulation data.
1986 ◽
Vol 84
(3)
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pp. 1788-1794
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2017 ◽
Vol 05
(03)
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pp. 71-80
2000 ◽
Vol 28
(1)
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pp. 75-81
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