Investigation on Low-temperature Temporary Bonding for Microfluidic Devices in Lifescience Applications

In this paper, a novel bonding method for microfluidic devices was presented. The organic solvent fumigation bonding method can be used to produce multi-layer PMMA microfluidic devices under the condition of room temperature and low pressure. During the bonding, we choose chloroform as bonding solvents, the polyimide tape was used to protect no-need-bonding side of the cover sheet and the sealant silicone adhesive was used to protect the microstructure in the bonding side. The substrate was fumigated for 5minutes in the saturated steam conditions, then remove the polyimide tape as well as the sealant silicone adhesive. Assemble the fumigation cover sheet to the substrate with microchannel by using fixtures, soon after put the fixture and the substrates into the oven, dried at 50 °C for 10 minutes. Finally, remove the fixture, the bonding complete. Because of the bonding was accomplished under conditions of low temperature and pressure, the deformation of microchannel is very small. When the method was used for multilayer chip bonding, it also achieved good results.

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Development of 3D Thin WLCSP Using Vertical Via Last TSV Technology with Various Temporary Bonding Materials and Low Temperature PECVD Process

2016 IEEE 66th Electronic Components and Technology Conference (ECTC) ◽

10.1109/ectc.2016.55 ◽

2016 ◽

Cited By ~ 5

Author(s):

Zhiyi Xiao ◽

Jun Fan ◽

Yulong Ren ◽

Yang Li ◽

Xiaohua Huang ◽

...

Keyword(s):

Low Temperature ◽

Temporary Bonding

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Low-temperature (below Tg) thermal bonding of COC microfluidic devices using UV photografted HEMA-modified substrates: high strength, stable hydrophilic, biocompatible surfaces

Journal of Materials Chemistry ◽

10.1039/c1jm11750e ◽

2011 ◽

Vol 21 (38) ◽

pp. 15031 ◽

Cited By ~ 23

Author(s):

Sunanda Roy ◽

C. Y. Yue ◽

S. S. Venkatraman ◽

L. L. Ma

Keyword(s):

Low Temperature ◽

High Strength ◽

Microfluidic Devices ◽

Thermal Bonding

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Microfluidic Devices Fabricated by LTCC Combined with Thick Film Lithography

Advanced Materials Research ◽

10.4028/www.scientific.net/amr.74.303 ◽

2009 ◽

Vol 74 ◽

pp. 303-306

Author(s):

Young Joon Yoon ◽

Jae Kyung Choi ◽

Jong Woo Lim ◽

Hyo Tae Kim ◽

Ji Hoon Kim ◽

...

Keyword(s):

Numerical Simulation ◽

Low Temperature ◽

Thick Film ◽

Microfluidic Devices ◽

Channel Width ◽

Simulation Data ◽

Passive Mixers

Low temperature co-fired ceramic (LTCC) process combined with thick film photolithography was employed to fabricate ceramic-based microfluidic devices. To check the applicability of novel process, three types of passive mixers, diffusion-driven T-type mixers with different channel width and convection-driven chaotic mixer, were fabricated and their microfluidic performance was evaluated. It was confirmed that the degree of mixing in ceramic-based microfluidic passive mixers was well matched with the numerical simulation data.

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Microfluidic Modules Integrated with Microwave Components—Overview of Applications from the Perspective of Different Manufacturing Technologies

Sensors ◽

10.3390/s21051710 ◽

2021 ◽

Vol 21 (5) ◽

pp. 1710

Author(s):

Laura Jasińska ◽

Karol Malecha

Keyword(s):

Low Temperature ◽

Literature Review ◽

Microfluidic Devices ◽

Polymer Materials ◽

Silicon Substrates ◽

Dielectric Heating ◽

Dielectric Parameters ◽

Microwave Components ◽

Easy Integration ◽

Manufacturing Technologies

The constant increase in the number of microfluidic-microwave devices can be explained by various advantages, such as relatively easy integration of various microwave circuits in the device, which contains microfluidic components. To achieve the aforementioned solutions, four trends of manufacturing appear—manufacturing based on epoxy-glass laminates, polymer materials (mostly common in use are polydimethylsiloxane (PDMS) and polymethyl 2-methylpropenoate (PMMA)), glass/silicon substrates, and Low-Temperature Cofired Ceramics (LTCCs). Additionally, the domains of applications the microwave-microfluidic devices can be divided into three main fields—dielectric heating, microwave-based detection in microfluidic devices, and the reactors for microwave-enhanced chemistry. Such an approach allows heating or delivering the microwave power to the liquid in the microchannels, as well as the detection of its dielectric parameters. This article consists of a literature review of exemplary solutions that are based on the above-mentioned technologies with the possibilities, comparison, and exemplary applications based on each aforementioned technology.

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