Three-Dimensional Imaging of Extended Defects in 4H-SiC by Optical Second-Harmonic Generation
2014 ◽
Vol 778-780
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pp. 338-341
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Keyword(s):
This paper demonstrates optical second-harmonic generation (SHG) and two-photon excited photoluminescence (2P-PL) imaging of 3C-SiC inclusions forming triangular and carrot-type defects in 4H-SiC epilayers. Triangular defects exhibit clear SHG images because 3C-SiC is SHG active, but not 4H-SiC host crystal in c-axis incidence. A carrot defect provides SHG and 2P-PL images in different regions in a basal-plane fault area. The spectrums of the SHG and 2P-PL are also investigated, and their emission mechanisms discussed.
2007 ◽
Vol 253
(3-4)
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pp. 359-368
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1988 ◽
Vol 21
(9)
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pp. 1681-1697
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2013 ◽
Vol 18
(11)
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pp. 116008
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