Special/Issue. Surface Control Technology for LSI Processes. Roughness Evaluation of Silicon Surfaces by Scanning Force Miroscopy.

Mineharu SUZUKI

doi:10.4139/sfj.45.17

Special/Issue. Surface Control Technology for LSI Processes. Roughness Evaluation of Silicon Surfaces by Scanning Force Miroscopy.

Journal of The Surface Finishing Society of Japan ◽

10.4139/sfj.45.17 ◽

1994 ◽

Vol 45 (1) ◽

pp. 17-21

Author(s):

Mineharu SUZUKI

Keyword(s):

Silicon Surfaces ◽

Control Technology ◽

Special Issue ◽

Surface Control ◽

Scanning Force ◽

Roughness Evaluation

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Special Issue. Surface Control Technology for LSI Processes. Cr2O3 and NiF2 Passivation Technology of Metal Surface.

Journal of The Surface Finishing Society of Japan ◽

10.4139/sfj.45.26 ◽

1994 ◽

Vol 45 (1) ◽

pp. 26-31 ◽

Cited By ~ 1

Author(s):

Tadahiro OHMI

Keyword(s):

Metal Surface ◽

Control Technology ◽

Special Issue ◽

Surface Control

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Special Issue. Surface Control Technology for LSI Processs. High Purification of Semiconductor Gas.

Journal of The Surface Finishing Society of Japan ◽

10.4139/sfj.45.38 ◽

1994 ◽

Vol 45 (1) ◽

pp. 38-42

Author(s):

Takuya Ikeda

Keyword(s):

Control Technology ◽

Special Issue ◽

Surface Control ◽

High Purification

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Special Issue. Surface Control Technology for LSI Processes. Analysis of Metallic Contamination on a Wafer.

Journal of The Surface Finishing Society of Japan ◽

10.4139/sfj.45.6 ◽

1994 ◽

Vol 45 (1) ◽

pp. 6-11 ◽

Cited By ~ 1

Author(s):

Tsuneo AJIOKA

Keyword(s):

Control Technology ◽

Special Issue ◽

Surface Control ◽

Metallic Contamination

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Special Issue. Surface Control Technology for LSI Processes. Technological Importance of Surface Control Science from Manufacturing Viewpoint.

Journal of The Surface Finishing Society of Japan ◽

10.4139/sfj.45.2 ◽

1994 ◽

Vol 45 (1) ◽

pp. 2-5

Author(s):

Atsuyoshi KOIKE

Keyword(s):

Control Technology ◽

Special Issue ◽

Surface Control

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Special Issue. Surface Control Technology for LSI Processes. Silicon Native Oxide.

Journal of The Surface Finishing Society of Japan ◽

10.4139/sfj.45.12 ◽

1994 ◽

Vol 45 (1) ◽

pp. 12-16

Author(s):

Takeo HATTORI

Keyword(s):

Native Oxide ◽

Control Technology ◽

Special Issue ◽

Surface Control

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Disease and Insect Pest Control Technology of Plant Using Artificial Light(Plant Production Applied by Lighting Technology)

JOURNAL OF THE ILLUMINATING ENGINEERING INSTITUTE OF JAPAN ◽

10.2150/jieij.95.211 ◽

2011 ◽

Vol 95 (4) ◽

pp. 211-215

Author(s):

Makoto Yamada

Keyword(s):

Pest Control ◽

Insect Pest ◽

Plant Production ◽

Artificial Light ◽

Control Technology ◽

Special Issue ◽

Lighting Technology ◽

Insect Pest Control

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Sensing and Control of Vibration in Automobiles(Semsing and Active Control Technology in Recent Dynamic Problems)

Journal of the Society of Mechanical Engineers ◽

10.1299/jsmemag.89.811_649 ◽

1986 ◽

Vol 89 (811) ◽

pp. 649-654

Author(s):

Junsuke KUROKI ◽

Takeshi FUJISHIRO

Keyword(s):

Active Control ◽

Control Technology ◽

Dynamic Problems ◽

Special Issue ◽

And Control

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Active Control and Identification Technique in Vibration Problem(Semsing and Active Control Technology in Recent Dynamic Problems)

Journal of the Society of Mechanical Engineers ◽

10.1299/jsmemag.89.811_635 ◽

1986 ◽

Vol 89 (811) ◽

pp. 635-642

Author(s):

Kazuto SETO ◽

Kohei SUZUKI

Keyword(s):

Active Control ◽

Control Technology ◽

Dynamic Problems ◽

Special Issue ◽

Vibration Problem ◽

Identification Technique

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Note on Vibration Sensing(Semsing and Active Control Technology in Recent Dynamic Problems)

Journal of the Society of Mechanical Engineers ◽

10.1299/jsmemag.89.811_624 ◽

1986 ◽

Vol 89 (811) ◽

pp. 624-627

Author(s):

Masaharu KUNIEDA

Keyword(s):

Active Control ◽

Control Technology ◽

Dynamic Problems ◽

Special Issue ◽

Vibration Sensing

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Study of planarization of cobalt silicide lines and silicon surfaces by scanning force microscopy and scanning electron microscopy

Applied Physics Letters ◽

10.1063/1.101386 ◽

1989 ◽

Vol 54 (16) ◽

pp. 1543-1545 ◽

Cited By ~ 5

Author(s):

K.‐H. Robrock ◽

K. N. Tu ◽

D. W. Abraham ◽

J. B. Clabes

Keyword(s):

Electron Microscopy ◽

Scanning Electron Microscopy ◽

Scanning Force Microscopy ◽

Silicon Surfaces ◽

Cobalt Silicide ◽

Force Microscopy ◽

Scanning Force ◽

Scanning Electron

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