Electrokinetic Liquid Flow Sensor
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This paper deals with fabrication and characterization of liquid flow sensor based on electrokinetic effect – streaming potential. The possibility of using silicon microchannel membrane as a sensing element of the sensor has been demonstrated. Electric response of the sensor has been determined by passing deionized water through the membrane. A linear dependence of the operating characteristic has been found. Sensitivity and performance of the electrokinetic device have been evaluated. The optimal design of the liquid flow sensor has been proposed
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2010 ◽
Vol 55
(23)
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pp. 2579-2583
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2015 ◽
Vol 493
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pp. 66-79
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2013 ◽
Vol 193
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pp. 25-29
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2015 ◽
Vol 22
(9)
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pp. 2329-2339
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2005 ◽
Vol 122
(2)
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pp. 231-234
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Fabrication and characterization of a directional anemometer based on a single chip MEMS flow sensor
2011 ◽
Vol 88
(8)
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pp. 2214-2217
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