Residual stress measurement of porous silicon thin film by substrate curvature method
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2006 ◽
Vol 326-328
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pp. 223-226
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2015 ◽
Vol 66
(12)
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pp. 636-641
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2002 ◽
Vol 12
(6)
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pp. 917-924
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2007 ◽
Vol 2007.13
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pp. 241-242
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2001 ◽
Vol 50
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pp. 713-718
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