residual inductance
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Fabrication of NdFeB Thin Film and Its Application in MEMS

2002 ◽  
Author(s):  
Pan Zheng ◽  
Mohammad Kilani ◽  
Yousef S. Haik ◽  
Ching-Jen Chen
Keyword(s):  
Magnetic Field ◽  
Thin Film ◽  
Thin Films ◽  
Magnetic Properties ◽  
Saturation Magnetization ◽  
Transmission System ◽  
Gear Transmission ◽  
Energy Product ◽  
Gear Transmission System ◽  
Residual Inductance

The paper measures the magnetic properties of NdFeB thin films developed under the effects of magnetic field. The samples exhibited a larger residual inductance, saturation magnetization and energy product than those treated without field or with weaker field. Magnetic MEMS was introduced with application of the NdFeB film to micro device such as pumps and gear transmission system.

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