Analysis of the Thermoelastic Damping Effect in Electrostatically Actuated MEMS Resonators

An important aspect that must be considered when designing micro-electro-mechanical systems (MEMS) for all domains, including robotics, is the thermoelastic damping which occurs when the MEMS material is subjected to cyclic stress. This paper is focused on a model for the thermoelastic damping developed based on the generalized thermoelastic theory with the non-Fourier thermal conduction equation. The model was implemented in MATLAB and several simulations were performed. The theoretical results show a decrease in the deflection amplitude with the increase in time. The deflection amplitude decrease was validated by the experimental investigations, consisting of measuring the loss in amplitude and velocity of oscillations as a function of time. Moreover, this paper also presents the influence of the geometric dimensions on the mentioned decrease, as well as on the initial and final values of the amplitude for several polysilicon resonators investigated in this paper.

Research on Thermo Effects of Silver Modified by High-Intensity Pulsed Ion Beam

We report a modification method for Silver target by high-intensity pulsed ion beam (HIPIB) irradiation. Based on the temporal and spatial distribution models of the ion beam density detected by Faraday cup in the chamber and the ions accelerating voltage, the energy deposition of the beam ions in Ag is calculated by Monte Carlo method. Taking this time-dependent nonlinear deposited energy as the source term of two-dimensional thermal conduction equation, we obtain the temporal and spatial ablation process of metal Ag during a pulse time. The top-layer silver material in thickness of about 0.33μm is ablated by vaporization and the layer in thickness of 1.6μm is melted after one shot at the ion beam density of 300 A/cm2.

The Irradiation Effects of Metal Gold Surface by Intense Pulsed Ion Beam

We report a modification method for Gold target by intense pulsed ion beam (IPIB) irradiation. Based on the temporal and spatial distribution models of the ion beam density detected by Faraday cup in the chamber and the ions accelerating voltage, the energy deposition of the beam ions in Au is calculated by Monte Carlo method. Taking this time-dependent nonlinear deposited energy as the source term of two-dimensional thermal conduction equation, we obtain the temporal and spatial ablation process of metal Au during a pulse time. The top-layer Gold material in thickness of about 0.25μm is ablated by vaporization and the layer in thickness of 1.40μm is melted after one shot at the ion beam density of 300 A/cm2.