2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics
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9781424406418
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Bi-directionally Driven Metal Cantilevers Developed for Optical Actuation

2007 ◽  
Author(s):  
H. Kwon ◽  
M. Nakada ◽  
Y. Hirabayashi ◽  
A. Higo ◽  
M. Ataka ◽  
...  

FR-4 as a New MOEMS Platform

2007 ◽  
Author(s):  
S. Holmstrom ◽  
A.D. Yalcinkaya ◽  
S. Isikman ◽  
C. Ataman ◽  
H. Urey

Vertical Comb-Drive MEMS Mirror for Optical Spectrum Sensing

2007 ◽  
Author(s):  
Daisuke Inoue ◽  
Fumikazu Oohira ◽  
Kazuya Yamamoto ◽  
Masahiro Kondo ◽  
Takaki Harada ◽  
...  
Keyword(s):  
Spectrum Sensing ◽  
Optical Spectrum ◽  
Comb Drive

Optical NEMS Based Force Sensor Using Silicon Nanophotonics

2007 ◽  
Author(s):  
Chengkuo Lee ◽  
Rohit Radhakrishnan ◽  
Chii-Chang Chen ◽  
Jing Li ◽  
Narayanan Balasubramanian
Keyword(s):  
Force Sensor ◽  
Silicon Nanophotonics
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