Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop
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A process-independent run-to-run controller and its application to chemical-mechanical planarization

Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop ◽

10.1109/asmc.1995.484370 ◽

2002 ◽

Cited By ~ 16

Author(s):

J.R. Moyne ◽

R. Telfeyan ◽

A. Hunvitz ◽

J. Taylor

Keyword(s):

Chemical Mechanical Planarization

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RTP installed base productivity improvement project

Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop ◽

10.1109/asmc.1995.484364 ◽

2002 ◽

Author(s):

T. Speranza ◽

D. Tomlinson

Keyword(s):

Productivity Improvement ◽

Improvement Project

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Cost reduction in a manufacturing fabricator: from the bottom up

Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop ◽

10.1109/asmc.1995.484337 ◽

2002 ◽

Cited By ~ 1

Author(s):

S.M. Cogley

Keyword(s):

Cost Reduction ◽

Bottom Up

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Implementation of CMP-based design rules and patterning practices

Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop ◽

10.1109/asmc.1995.484326 ◽

2002 ◽

Cited By ~ 7

Author(s):

L.E. Camilletti

Keyword(s):

Design Rules

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Current realities and future opportunities for Russia's semiconductor industry

Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop ◽

10.1109/asmc.1995.484368 ◽

2002 ◽

Author(s):

A. Sukhoparov

Keyword(s):

Semiconductor Industry

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Development of an intelligent scheduler for semiconductor manufacturing facilities

Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop ◽

10.1109/asmc.1995.484359 ◽

2002 ◽

Author(s):

E. Schorn-DiSalvi ◽

R. Liquigan ◽

B.A. Peters ◽

J.S. Smith

Keyword(s):

Semiconductor Manufacturing ◽

Manufacturing Facilities

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Spatial yield modeling for semiconductor wafers

Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop ◽

10.1109/asmc.1995.484386 ◽

2002 ◽

Cited By ~ 8

Author(s):

A.I. Mirza ◽

G. O'Donoghue ◽

A.W. Drake ◽

S.C. Graves

Keyword(s):

Yield Modeling

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Customer/supplier partnering to provide statistical models to predict new hardware and process interactions and limitations

Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop ◽

10.1109/asmc.1995.484390 ◽

2002 ◽

Author(s):

B. Brennan ◽

T. Mitchell

Keyword(s):

Statistical Models

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Facility fluids cost models

Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop ◽

10.1109/asmc.1995.484336 ◽

2002 ◽

Cited By ~ 1

Author(s):

N. Patel ◽

T. Boswell ◽

T. Nelson

Keyword(s):

Cost Models

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Out of the foxhole-moving toward accountability

Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop ◽

10.1109/asmc.1995.484401 ◽

2002 ◽

Author(s):

J.J. Cronin ◽

K.R. Jean ◽

T.T.H. Tang

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Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and WorkshopLatest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

A process-independent run-to-run controller and its application to chemical-mechanical planarization

RTP installed base productivity improvement project

Cost reduction in a manufacturing fabricator: from the bottom up

Implementation of CMP-based design rules and patterning practices

Current realities and future opportunities for Russia's semiconductor industry

Development of an intelligent scheduler for semiconductor manufacturing facilities

Spatial yield modeling for semiconductor wafers

Customer/supplier partnering to provide statistical models to predict new hardware and process interactions and limitations

Facility fluids cost models

Out of the foxhole-moving toward accountability

Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop
Latest Publications