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Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop
Latest Publications
TOTAL DOCUMENTS
85
(FIVE YEARS 0)
H-INDEX
7
(FIVE YEARS 0)
Published By IEEE
0780327136
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Latest Documents
Most Cited Documents
Contributed Authors
Related Sources
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RTP installed base productivity improvement project
Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop
◽
10.1109/asmc.1995.484364
◽
2002
◽
Author(s):
T. Speranza
◽
D. Tomlinson
Keyword(s):
Productivity Improvement
◽
Improvement Project
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Cost reduction in a manufacturing fabricator: from the bottom up
Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop
◽
10.1109/asmc.1995.484337
◽
2002
◽
Cited By ~ 1
Author(s):
S.M. Cogley
Keyword(s):
Cost Reduction
◽
Bottom Up
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A process-independent run-to-run controller and its application to chemical-mechanical planarization
Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop
◽
10.1109/asmc.1995.484370
◽
2002
◽
Cited By ~ 16
Author(s):
J.R. Moyne
◽
R. Telfeyan
◽
A. Hunvitz
◽
J. Taylor
Keyword(s):
Chemical Mechanical Planarization
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Current realities and future opportunities for Russia's semiconductor industry
Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop
◽
10.1109/asmc.1995.484368
◽
2002
◽
Author(s):
A. Sukhoparov
Keyword(s):
Semiconductor Industry
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Development of an intelligent scheduler for semiconductor manufacturing facilities
Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop
◽
10.1109/asmc.1995.484359
◽
2002
◽
Author(s):
E. Schorn-DiSalvi
◽
R. Liquigan
◽
B.A. Peters
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J.S. Smith
Keyword(s):
Semiconductor Manufacturing
◽
Manufacturing Facilities
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Spatial yield modeling for semiconductor wafers
Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop
◽
10.1109/asmc.1995.484386
◽
2002
◽
Cited By ~ 8
Author(s):
A.I. Mirza
◽
G. O'Donoghue
◽
A.W. Drake
◽
S.C. Graves
Keyword(s):
Yield Modeling
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Implementation of CMP-based design rules and patterning practices
Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop
◽
10.1109/asmc.1995.484326
◽
2002
◽
Cited By ~ 7
Author(s):
L.E. Camilletti
Keyword(s):
Design Rules
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Customer/supplier partnering to provide statistical models to predict new hardware and process interactions and limitations
Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop
◽
10.1109/asmc.1995.484390
◽
2002
◽
Author(s):
B. Brennan
◽
T. Mitchell
Keyword(s):
Statistical Models
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Facility fluids cost models
Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop
◽
10.1109/asmc.1995.484336
◽
2002
◽
Cited By ~ 1
Author(s):
N. Patel
◽
T. Boswell
◽
T. Nelson
Keyword(s):
Cost Models
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Out of the foxhole-moving toward accountability
Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop
◽
10.1109/asmc.1995.484401
◽
2002
◽
Author(s):
J.J. Cronin
◽
K.R. Jean
◽
T.T.H. Tang
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