Laser and Electron Beam Processing of Materials
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9780127468501
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IMPURITY DIFFUSION IN ION-IMPLANTED A1 DURING ELECTRON-BEAM-PULSED ANNEALING

1980 ◽  
pp. 702-707
Author(s):  
W.R. Wampler ◽  
D.M. Follstaedt ◽  
S.T. Picraux
Keyword(s):  
Electron Beam ◽  
Impurity Diffusion ◽  
Ion Implanted

THE EFFECTS OF LASER IRRADIATION ON MONOLITHIC RESISTORS

1980 ◽  
pp. 678-683
Author(s):  
J.E. Small ◽  
D.L. Parker ◽  
W.A. Porter
Keyword(s):  
Laser Irradiation

ELECTRON BEAM ANNEALING OF ARSENIC IMPLANTED SILICON IN WINDOWS DEFINED BY OXIDE

1980 ◽  
pp. 645-650 ◽  
Author(s):  
J.M. Leas ◽  
P.J. Smith ◽  
A. Nagarajan ◽  
A. Leighton
Keyword(s):  
Electron Beam

PROPERTIES OF MOSFETS FABRICATED IN LASER-ANNEALED POLYSILICON FILMS

1980 ◽  
pp. 632-638 ◽  
Author(s):  
K.F. Lee ◽  
J.F. Gibbons ◽  
K.C. Saraswat ◽  
T.I. Kamins ◽  
H.W. Lam ◽  
...  
Keyword(s):  
Polysilicon Films

PULSED ELECTRON BEAM LIQUID EPITAXY

1980 ◽  
pp. 575-580 ◽  
Author(s):  
A.C. Greenwald ◽  
J.J. Comer
Keyword(s):  
Electron Beam ◽  
Pulsed Electron Beam ◽  
Liquid Epitaxy

CHARACTERISTICS OF P+N ALLOY JUNCTIONS PRODUCED BY SINGLE LASER PULSES

1980 ◽  
pp. 549-555 ◽  
Author(s):  
H.G. Parks ◽  
K. Rose
Keyword(s):  
Laser Pulses ◽  
Single Laser

REDISTRIBUTION OF IMPLANTED Zn IN InP AFTER Q-SWITCHED LASER ANNEALING AND THE RELATED SPECIFIC CONTACT RESISTANCE

1980 ◽  
pp. 500-505
Author(s):  
Z.L. Liau ◽  
N.L. DeMeo ◽  
J.P. Donnelly ◽  
C.G. Hopkins ◽  
J.C. Norberg ◽  
...  
Keyword(s):  
Contact Resistance ◽  
Laser Annealing ◽  
Specific Contact Resistance ◽  
Specific Contact

PULSED ELECTRON BEAM ALLOYING OF Au-Ge/Pt OHMIC CONTACTS TO GaAs

1980 ◽  
pp. 487-493 ◽  
Author(s):  
J.L. Tandon ◽  
C.G. Kirkpatrick ◽  
B.M. Welch ◽  
P. Fleming Rockwell
Keyword(s):  
Electron Beam ◽  
Ohmic Contacts ◽  
Pulsed Electron Beam

POST ILLUMINATION ANNEALING OF DEFECTS IN LASER-PROCESSED SILICON

1980 ◽  
pp. 430-434 ◽  
Author(s):  
J.L. Benton ◽  
C.J. Doherty ◽  
S.D. Ferris ◽  
L.C. Kimerling ◽  
H.J. Leamy ◽  
...  
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