Reactive Sputter Deposition - Springer Series in Materials Science
Latest Publications

TOTAL DOCUMENTS

14

(FIVE YEARS 0)

H-INDEX

5

(FIVE YEARS 0)

Published By Springer Berlin Heidelberg

9783540766629, 9783540766643

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Reactively Sputter-Deposited Solid Electrolytes and Their Applications

Reactive Sputter Deposition - Springer Series in Materials Science ◽

10.1007/978-3-540-76664-3_11 ◽

2008 ◽

pp. 367-411 ◽

Author(s):

Pascal Briois ◽

Frédéric Lapostolle ◽

Alain Billard

Keyword(s):

Solid Electrolytes ◽

Sputter Deposited

Download Full-text

Transport of Sputtered Particles Through the Gas Phase

Reactive Sputter Deposition - Springer Series in Materials Science ◽

10.1007/978-3-540-76664-3_6 ◽

2008 ◽

pp. 199-227 ◽

Author(s):

Stijn Mahieu ◽

Koen Van Aeken ◽

Diederik Depla

Keyword(s):

Download Full-text

Energy Deposition at the Substrate in a Magnetron Sputtering System

Reactive Sputter Deposition - Springer Series in Materials Science ◽

10.1007/978-3-540-76664-3_7 ◽

2008 ◽

pp. 229-254 ◽

Author(s):

Samuel D. Ekpe ◽

Steven K. Dew

Keyword(s):

Magnetron Sputtering ◽

Energy Deposition ◽

Sputtering System

Download Full-text

Depositing Aluminium Oxide: A Case Study of Reactive Magnetron Sputtering

Reactive Sputter Deposition - Springer Series in Materials Science ◽

10.1007/978-3-540-76664-3_5 ◽

2008 ◽

pp. 153-197 ◽

Author(s):

Diederik Depla ◽

Stijn Mahieu ◽

Roger De Gryse

Keyword(s):

Magnetron Sputtering ◽

Aluminium Oxide ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron

Download Full-text

Modeling of the Magnetron Discharge

Reactive Sputter Deposition - Springer Series in Materials Science ◽

10.1007/978-3-540-76664-3_3 ◽

2008 ◽

pp. 61-130 ◽

Author(s):

Annemie Bogaerts ◽

Ivan Kolev ◽

Guy Buyle

Keyword(s):

Magnetron Discharge

Download Full-text

Atomic Assembly of Magnetoresistive Multilayers

Reactive Sputter Deposition - Springer Series in Materials Science ◽

10.1007/978-3-540-76664-3_14 ◽

2008 ◽

pp. 497-559 ◽

Author(s):

Haydn Wadley ◽

Xiaowang Zhou ◽

William H. Butler

Download Full-text

Modelling of Reactive Sputtering Processes

Reactive Sputter Deposition - Springer Series in Materials Science ◽

10.1007/978-3-540-76664-3_4 ◽

2008 ◽

pp. 131-152 ◽

Author(s):

Sören Berg ◽

Tomas Nyberg ◽

Tomas Kubart

Keyword(s):

Reactive Sputtering

Download Full-text

Optical Plasma Diagnostics During Reactive Magnetron Sputtering

Reactive Sputter Deposition - Springer Series in Materials Science ◽

10.1007/978-3-540-76664-3_9 ◽

2008 ◽

pp. 301-335 ◽

Author(s):

Stephanos Konstantinidis ◽

F. Gaboriau ◽

M. Gaillard ◽

M. Hecq ◽

A. Ricard

Keyword(s):

Magnetron Sputtering ◽

Plasma Diagnostics ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron

Download Full-text

Oxide-Based Electrochromic Materials and Devices Prepared by Magnetron Sputtering

Reactive Sputter Deposition - Springer Series in Materials Science ◽

10.1007/978-3-540-76664-3_13 ◽

2008 ◽

pp. 485-495 ◽

Author(s):

C. G. Granqvist

Keyword(s):

Magnetron Sputtering ◽

Electrochromic Materials

Download Full-text

Simulation of the Sputtering Process

Reactive Sputter Deposition - Springer Series in Materials Science ◽

10.1007/978-3-540-76664-3_1 ◽

2008 ◽

pp. 1-42 ◽

Author(s):

Tadayoshi Ono ◽

Takahiro Kenmotsu ◽

Tetsuya Muramoto

Download Full-text