Reactive Sputter Deposition - Springer Series in Materials Science
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Published By Springer Berlin Heidelberg

9783540766629, 9783540766643

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Depositing Aluminium Oxide: A Case Study of Reactive Magnetron Sputtering

Reactive Sputter Deposition - Springer Series in Materials Science ◽

10.1007/978-3-540-76664-3_5 ◽

2008 ◽

pp. 153-197 ◽

Cited By ~ 13

Author(s):

Diederik Depla ◽

Stijn Mahieu ◽

Roger De Gryse

Keyword(s):

Magnetron Sputtering ◽

Aluminium Oxide ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron

Reactively Sputter-Deposited Solid Electrolytes and Their Applications

Reactive Sputter Deposition - Springer Series in Materials Science ◽

10.1007/978-3-540-76664-3_11 ◽

2008 ◽

pp. 367-411 ◽

Cited By ~ 1

Author(s):

Pascal Briois ◽

Frédéric Lapostolle ◽

Alain Billard

Keyword(s):

Solid Electrolytes ◽

Sputter Deposited

Transport of Sputtered Particles Through the Gas Phase

Reactive Sputter Deposition - Springer Series in Materials Science ◽

10.1007/978-3-540-76664-3_6 ◽

2008 ◽

pp. 199-227 ◽

Cited By ~ 5

Author(s):

Stijn Mahieu ◽

Koen Van Aeken ◽

Diederik Depla

Keyword(s):

Gas Phase

Energy Deposition at the Substrate in a Magnetron Sputtering System

Reactive Sputter Deposition - Springer Series in Materials Science ◽

10.1007/978-3-540-76664-3_7 ◽

2008 ◽

pp. 229-254 ◽

Cited By ~ 3

Author(s):

Samuel D. Ekpe ◽

Steven K. Dew

Keyword(s):

Magnetron Sputtering ◽

Energy Deposition ◽

Sputtering System

Optical Plasma Diagnostics During Reactive Magnetron Sputtering

Reactive Sputter Deposition - Springer Series in Materials Science ◽

10.1007/978-3-540-76664-3_9 ◽

2008 ◽

pp. 301-335 ◽

Cited By ~ 4

Author(s):

Stephanos Konstantinidis ◽

F. Gaboriau ◽

M. Gaillard ◽

M. Hecq ◽

A. Ricard

Keyword(s):

Magnetron Sputtering ◽

Plasma Diagnostics ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron

Modeling of the Magnetron Discharge

Reactive Sputter Deposition - Springer Series in Materials Science ◽

10.1007/978-3-540-76664-3_3 ◽

2008 ◽

pp. 61-130 ◽

Cited By ~ 5

Author(s):

Annemie Bogaerts ◽

Ivan Kolev ◽

Guy Buyle

Keyword(s):

Magnetron Discharge

Atomic Assembly of Magnetoresistive Multilayers

Reactive Sputter Deposition - Springer Series in Materials Science ◽

10.1007/978-3-540-76664-3_14 ◽

2008 ◽

pp. 497-559 ◽

Cited By ~ 2

Author(s):

Haydn Wadley ◽

Xiaowang Zhou ◽

William H. Butler

Modelling of Reactive Sputtering Processes

Reactive Sputter Deposition - Springer Series in Materials Science ◽

10.1007/978-3-540-76664-3_4 ◽

2008 ◽

pp. 131-152 ◽

Cited By ~ 4

Author(s):

Sören Berg ◽

Tomas Nyberg ◽

Tomas Kubart

Keyword(s):

Reactive Sputtering

Simulation of the Sputtering Process

Reactive Sputter Deposition - Springer Series in Materials Science ◽

10.1007/978-3-540-76664-3_1 ◽

2008 ◽

pp. 1-42 ◽

Cited By ~ 5

Author(s):

Tadayoshi Ono ◽

Takahiro Kenmotsu ◽

Tetsuya Muramoto

Oxide-Based Electrochromic Materials and Devices Prepared by Magnetron Sputtering

Reactive Sputter Deposition - Springer Series in Materials Science ◽

10.1007/978-3-540-76664-3_13 ◽

2008 ◽

pp. 485-495 ◽

Cited By ~ 4

Author(s):

C. G. Granqvist

Keyword(s):

Magnetron Sputtering ◽

Electrochromic Materials

Reactive Sputter Deposition - Springer Series in Materials ScienceLatest Publications

TOTAL DOCUMENTS

H-INDEX

Published By Springer Berlin Heidelberg

Depositing Aluminium Oxide: A Case Study of Reactive Magnetron Sputtering

Reactively Sputter-Deposited Solid Electrolytes and Their Applications

Transport of Sputtered Particles Through the Gas Phase

Energy Deposition at the Substrate in a Magnetron Sputtering System

Optical Plasma Diagnostics During Reactive Magnetron Sputtering

Modeling of the Magnetron Discharge

Atomic Assembly of Magnetoresistive Multilayers

Modelling of Reactive Sputtering Processes

Simulation of the Sputtering Process

Oxide-Based Electrochromic Materials and Devices Prepared by Magnetron Sputtering

Reactive Sputter Deposition - Springer Series in Materials Science
Latest Publications