reactive sputtering
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Role of oxygen flow rate on the structure and stoichiometry of cobalt oxide films deposited by reactive sputtering

2022 ◽  
Vol 40 (1) ◽  
pp. 013405
Author(s):  
Nilton Francelosi A. Neto ◽  
Cristiane Stegemann ◽  
Lucas J. Affonço ◽  
Douglas M. G. Leite ◽  
José H. D. da Silva
Keyword(s):  
Cobalt Oxide ◽  
Flow Rate ◽  
Oxide Films ◽  
Reactive Sputtering ◽  
Oxygen Flow Rate ◽  
Oxygen Flow

scholarly journals Structural, Morphological, Vibrational and Optical Properties of GaN Films Grown by Reactive Sputtering: The Effect of RF Power at Low Working Pressure Limit

2022 ◽  
Vol 25 ◽  
Author(s):  
R. S. de Oliveira ◽  
H. A. Folli ◽  
C. Stegemann ◽  
I. M. Horta ◽  
B. S. Damasceno ◽  
...  
Keyword(s):  
Optical Properties ◽  
Reactive Sputtering ◽  
Rf Power ◽  
Working Pressure ◽  
Pressure Limit

scholarly journals Thin films made by reactive sputtering of high entropy alloy FeCoNiCuGe: optical, electrical and structural properties

2022 ◽  
pp. 139083
Author(s):  
J. Mayandi ◽  
T.G. Finstad ◽  
Ø. Dahl ◽  
P. Vajeeston ◽  
M. Schrade ◽  
...  
Keyword(s):  
Thin Films ◽  
Structural Properties ◽  
Reactive Sputtering ◽  
High Entropy Alloy ◽  
High Entropy

Hybrid reactive sputtering of transition metal aluminum oxynitrides

2021 ◽  
pp. 139028
Author(s):  
K. Bobzin ◽  
C. Kalscheuer ◽  
M. Carlet ◽  
C. Schulze
Keyword(s):  
Transition Metal ◽  
Reactive Sputtering ◽  
Metal Aluminum

scholarly journals Development of digitally processed DC reactive sputtering and its application to the synthesis of (Er0.1Y0.9)2SiO5 layered crystalline thin film

2021 ◽  
Vol 130 (18) ◽  
pp. 185301
Author(s):  
Hideo Isshiki ◽  
Yasuhito Tanaka ◽  
Tomoki Kasumi ◽  
Ghent Nakamura ◽  
Shinichiro Saisho
Keyword(s):  
Thin Film ◽  
Reactive Sputtering

Microstructure and Magnetic properties of FeCoHfN thin films deposited by DC reactive sputtering

2021 ◽  
pp. 168777
Author(s):  
Tianyuan Li ◽  
Xiyang Liu ◽  
Jiawei Li ◽  
Lining Pan ◽  
Aina He ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetic Properties ◽  
Reactive Sputtering ◽  
Microstructure And Magnetic Properties

Optimization of Zn 1‐x Sn x O buffer layer for application in CZTSe solar cells with H 2 assisted reactive sputtering

2021 ◽  
Author(s):  
Shengli Zhang ◽  
Jianyu Wu ◽  
Hongling Guo ◽  
Yali Sun ◽  
Zhiqiang Zhou ◽  
...  
Keyword(s):  
Solar Cells ◽  
Buffer Layer ◽  
Reactive Sputtering

scholarly journals Growth conditions and mechanisms for IrOx nano-platelet formation by reactive sputtering

2021 ◽  
pp. 126374
Author(s):  
Adam A. Wilson ◽  
Milena B. Graziano ◽  
Asher C. Leff ◽  
Brendan Hanrahan ◽  
David R. Baker ◽  
...  
Keyword(s):  
Reactive Sputtering ◽  
Growth Conditions ◽  
Platelet Formation
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