Novel Patterning Technologies 2018
Latest Publications

TOTAL DOCUMENTS

45
(FIVE YEARS 0)

H-INDEX

2
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Published By SPIE

9781510616608, 9781510616615
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Improvement of nano-imprint lithography performance for device fabrication

2018 ◽  
Author(s):  
Takuya Kono ◽  
Masayuki Hatano ◽  
Masato Suzuki ◽  
Kazuya Fukuhara ◽  
Kei Kobayashi ◽  
...  
Keyword(s):  
Device Fabrication ◽  
Imprint Lithography ◽  
Nano Imprint

Multi-color approach on self-aligned multiple patterning for single line cut application

2018 ◽  
Author(s):  
Richard A. Farrell ◽  
Chia-Yun Hsieh ◽  
Eric Liu ◽  
Akiteru Ko ◽  
Peter Biolsi ◽  
...  
Keyword(s):  
Single Line

Multi-beam mask writer MBM-1000

2018 ◽  
Author(s):  
Hiroshi Matsumoto ◽  
Takao Tamura ◽  
Kenji Ohtoshi ◽  
Hideo Inoue ◽  
Hiroshi Yamashita

Effect of homopolymer concentration on LER and LWR in block copolymer/homopolymer blends

2018 ◽  
Author(s):  
Caleb L. Breaux ◽  
Jakin B. Delony ◽  
Peter J. Ludovice ◽  
Clifford L. Henderson
Keyword(s):  
Block Copolymer ◽  
Homopolymer Blends

The integration of 193i and DSA for BEOL metal cuts/blocks targeting sub-20nm tip-to-tip CD

2018 ◽  
Author(s):  
Chi-Chun Liu ◽  
Yann Mignot ◽  
Cheng Chi ◽  
Kafai Lai ◽  
Jing Sha ◽  
...  

Process control technology for nanoimprint lithography

2018 ◽  
Author(s):  
Hirotaka Tsuda ◽  
Hirokazu Washida ◽  
Motofumi Komori ◽  
Takuya Kono ◽  
Tetsuro Nakasugi ◽  
...  
Keyword(s):  
Process Control ◽  
Nanoimprint Lithography ◽  
Control Technology

Material development for high-throughput nanoimprint lithography

2018 ◽  
Author(s):  
Kei Kobayashi ◽  
Takayuki Nakamura ◽  
Hirokazu Kato ◽  
Masayuki Hatano ◽  
Hiroshi Tokue ◽  
...  
Keyword(s):  
High Throughput ◽  
Nanoimprint Lithography ◽  
Material Development

Nanoimprint lithography using gas permeable template II

2018 ◽  
Author(s):  
Satoshi Takei ◽  
Makoto Hanabata ◽  
Shinya Nakajima ◽  
Naoto Sugino ◽  
Yoko Matsumoto ◽  
...  
Keyword(s):  
Nanoimprint Lithography

High-throughput scanning probe instruments for nanopatterning, alignment, and overlay metrology

2018 ◽  
Author(s):  
Hamed Sadeghian ◽  
Rodolf Herfst ◽  
Klará Maturova ◽  
Abbas Mohtashami ◽  
Violeta Navarro ◽  
...  
Keyword(s):  
High Throughput ◽  
Scanning Probe
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