Fundamental Aspects of Silicon Oxidation - Springer Series in Materials Science
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Published By Springer Berlin Heidelberg

9783642625831, 9783642567117

Author(s):  
W. H. Schulte ◽  
T. Gustafsson ◽  
E. Garfunkel ◽  
I. J. R. Baumvol ◽  
E. P. Gusev
Keyword(s):  
Ion Beam ◽  

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