Impurity Doping Processes in Silicon - Materials Processing: Theory and Practices
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Impurity Profile of Implanted Ions in Silicon

Impurity Doping Processes in Silicon - Materials Processing: Theory and Practices ◽

10.1016/b978-0-444-86095-8.50013-6 ◽

1981 ◽

pp. 443-638 ◽

Author(s):

H. MAES ◽

W. VANDERVORST ◽

R. VAN OVERSTRAETEN

Keyword(s):

Impurity Profile

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Subject Index

Impurity Doping Processes in Silicon - Materials Processing: Theory and Practices ◽

10.1016/b978-0-444-86095-8.50014-8 ◽

1981 ◽

pp. 639-643

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Growth of Doped Silicon Layers by Molecular Beam Epitaxy

Impurity Doping Processes in Silicon - Materials Processing: Theory and Practices ◽

10.1016/b978-0-444-86095-8.50009-4 ◽

1981 ◽

pp. 175-215 ◽

Author(s):

J.C. BEAN

Keyword(s):

Molecular Beam Epitaxy ◽

Molecular Beam ◽

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Concentration Profiles of Diffused Dopants in Silicon

Impurity Doping Processes in Silicon - Materials Processing: Theory and Practices ◽

10.1016/b978-0-444-86095-8.50012-4 ◽

1981 ◽

pp. 315-442 ◽

Author(s):

RICHARD B. FAIR

Keyword(s):

Concentration Profiles

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Cvd Doping of Silicon

Impurity Doping Processes in Silicon - Materials Processing: Theory and Practices ◽

10.1016/b978-0-444-86095-8.50011-2 ◽

1981 ◽

pp. 259-314 ◽

Author(s):

MCDONALD ROBINSON

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Advisory Board

Impurity Doping Processes in Silicon - Materials Processing: Theory and Practices ◽

10.1016/b978-0-444-86095-8.50005-7 ◽

1981 ◽

pp. vii

Keyword(s):

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Double-Diffusion Processes in Silicon

Impurity Doping Processes in Silicon - Materials Processing: Theory and Practices ◽

10.1016/b978-0-444-86095-8.50006-9 ◽

1981 ◽

pp. 1-53 ◽

Author(s):

A.F.W. WILLOUGHBY

Keyword(s):

Diffusion Processes ◽

Double Diffusion

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Source Feed Materials in Ion Beam Technology

Impurity Doping Processes in Silicon - Materials Processing: Theory and Practices ◽

10.1016/b978-0-444-86095-8.50008-2 ◽

1981 ◽

pp. 147-174

Author(s):

A. AXMANN

Keyword(s):

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Preface to Volume 2

Impurity Doping Processes in Silicon - Materials Processing: Theory and Practices ◽

10.1016/b978-0-444-86095-8.50004-5 ◽

1981 ◽

pp. vi

Author(s):

Franklin F.Y. WANG

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Introduction to the Series

Impurity Doping Processes in Silicon - Materials Processing: Theory and Practices ◽

10.1016/b978-0-444-86095-8.50003-3 ◽

1981 ◽

pp. v

Author(s):

Franklin F.Y. WANG

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