Modeling Aspects in Optical Metrology VIII
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9781510644007, 9781510644014
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Identifying the type of line edge roughness using grazing-incidence x-ray fluorescence

2021 ◽  
Author(s):  
Zanyar Salami ◽  
Analía Fernández Herrero ◽  
Anna Andrle ◽  
Philipp Hönicke ◽  
Victor Soltwisch
Keyword(s):  
Grazing Incidence ◽  
Line Edge Roughness ◽  
X Ray ◽  
Edge Roughness

Welcome and Introduction to SPIE Conference 11783

2021 ◽  
Author(s):  
Bernd Bodermann ◽  
Karsten Frenner ◽  
Bryan M. Barnes

Modelling of transmission for a stack of two Fizeau wedges with matched parameters

2021 ◽  
Author(s):  
Elena Stoykova ◽  
Dimana Nazarova ◽  
Marin Nenchev ◽  
Margarita Deneva

Vectorial 3D modeling of coherence scanning interferometry

2021 ◽  
Author(s):  
Tobias Pahl ◽  
Sebastian Hagemeier ◽  
Marco Künne ◽  
Corvin Danzglock ◽  
Nils Reinhold ◽  
...  
Keyword(s):  
3D Modeling

Heat dynamics in optical ring resonators

2021 ◽  
Author(s):  
Walter Dickmann ◽  
Lukas Weituschat ◽  
René Eisermann ◽  
Stephan Krenek ◽  
Pablo Aitor Postigo ◽  
...  
Keyword(s):  
Ring Resonators ◽  
Optical Ring Resonators ◽  
Optical Ring

Characterization of the optical aberrations of a metrological UV microscope

2021 ◽  
Author(s):  
Jan Krüger ◽  
Bernd Bodermann ◽  
Rainer Köning ◽  
Wolfgang Haessler-Grohne ◽  
Han Xu
Keyword(s):  
Optical Aberrations

Applicability simulations of inverted plasmonic lenses

2021 ◽  
Author(s):  
Tim Käseberg ◽  
Thomas Siefke ◽  
Jana Grundmann ◽  
Stefanie Kroker ◽  
Bernd Bodermann
Keyword(s):  
Plasmonic Lenses
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