2021 China Semiconductor Technology International Conference (CSTIC)
Latest Publications

TOTAL DOCUMENTS

172
(FIVE YEARS 172)

H-INDEX

0
(FIVE YEARS 0)

Published By IEEE

9781665449458
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Wafer Defect Classification Based on DCNN Model

2021 ◽  
Author(s):  
Pan Tian ◽  
Chen Li ◽  
Hao Fu ◽  
Xueru Yu ◽  
Zhengying Wei ◽  
...  
Keyword(s):  
Defect Classification

Copper Corrosion Issue Analysis and Study on Advanced CMP Process

2021 ◽  
Author(s):  
Lei Zhang ◽  
Yuanyuan Meng ◽  
Yi Xian ◽  
Wei Zhang ◽  
Haifeng Zhou ◽  
...  
Keyword(s):  
Copper Corrosion ◽  
Issue Analysis ◽  
Analysis And Study
Load More ...
Sign in / Sign up

Export Citation Format

Share Document