Infrared Characterization for Microelectronics
Latest Publications

TOTAL DOCUMENTS

10

(FIVE YEARS 0)

H-INDEX

1

(FIVE YEARS 0)

Published By WORLD SCIENTIFIC

9789810223526, 9789812817464

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

THE CHARACTERIZATION OF SILICON DIOXIDE AND SILICON NITRIDE THIN FILMS

Infrared Characterization for Microelectronics ◽

10.1142/9789812817464_0005 ◽

1999 ◽

pp. 55-85

Keyword(s):

Silicon Nitride ◽

Silicon Dioxide

Download Full-text

THE CHARACTERIZATION OF AMORPHOUS SILICON AND RELATED MATERIALS

Infrared Characterization for Microelectronics ◽

10.1142/9789812817464_0007 ◽

1999 ◽

pp. 105-124

Keyword(s):

Amorphous Silicon

Download Full-text

THE PROPERTIES OF INFRARED TRANSPARENT SUBSTRATES

Infrared Characterization for Microelectronics ◽

10.1142/9789812817464_0002 ◽

1999 ◽

pp. 15-23 ◽

Download Full-text

THE MEASUREMENT OF EPITAXIAL LAYER THICKNESS

Infrared Characterization for Microelectronics ◽

10.1142/9789812817464_0004 ◽

1999 ◽

pp. 45-54

Keyword(s):

Layer Thickness ◽

Epitaxial Layer

Download Full-text

THE CHARACTERIZATION OF PSG, BPSG, SOG AND OTHER GLASSES

Infrared Characterization for Microelectronics ◽

10.1142/9789812817464_0006 ◽

1999 ◽

pp. 87-104

Download Full-text

BACK MATTER

Infrared Characterization for Microelectronics ◽

10.1142/9789812817464_bmatter ◽

1999 ◽

pp. 155-160

Download Full-text

FRONT MATTER

Infrared Characterization for Microelectronics ◽

10.1142/9789812817464_fmatter ◽

1999 ◽

pp. i-x

Download Full-text

MISCELLANEOUS APPLICATIONS OF INFRARED SPECTROSCOPY TO MICROELECTRONICS

Infrared Characterization for Microelectronics ◽

10.1142/9789812817464_0008 ◽

1999 ◽

pp. 125-154

Keyword(s):

Infrared Spectroscopy

Download Full-text

THE MEASUREMENT OF OXYGEN AND CARBON AND OTHER IMPURITIES IN SILICON

Infrared Characterization for Microelectronics ◽

10.1142/9789812817464_0003 ◽

1999 ◽

pp. 25-44 ◽

Download Full-text

INTRODUCTION TO INFRARED SPECTROSCOPY

Infrared Characterization for Microelectronics ◽

10.1142/9789812817464_0001 ◽

1999 ◽

pp. 1-13

Keyword(s):

Infrared Spectroscopy

Download Full-text