THE CHARACTERIZATION OF SILICON DIOXIDE AND SILICON NITRIDE THIN FILMS

1999 ◽  
pp. 55-85
Keyword(s):  
Thin Films ◽  
Silicon Nitride ◽  
Silicon Dioxide

Characterization of Silicon Nitride Thin Films on Si and Overlayer Growth of Si and Ge

2001 ◽  
Vol 40 (Part 1, No. 6B) ◽  
pp. 4292-4298 ◽  
Author(s):  
Xue-Sen Wang ◽  
Zongquan Li ◽  
Lei Wang ◽  
Yanfang Hu ◽  
Guangjie Zhai ◽  
...  
Keyword(s):  
Thin Films ◽  
Silicon Nitride

Growth studies and characterization of silicon nitride thin films deposited by alternating exposures to Si2Cl6 and NH3

2009 ◽  
Vol 517 (14) ◽  
pp. 3975-3978 ◽  
Author(s):  
Kwangchol Park ◽  
Won-Deok Yun ◽  
Byoung-Jun Choi ◽  
Heon-Do Kim ◽  
Won-Jun Lee ◽  
...  
Keyword(s):  
Thin Films ◽  
Silicon Nitride ◽  
Growth Studies

Characterization of ion-plated silicon nitride thin films

1992 ◽  
Vol 52 (2) ◽  
pp. 187-193 ◽  
Author(s):  
Juergen Ramm ◽  
Ralph E. Pixley
Keyword(s):  
Thin Films ◽  
Silicon Nitride

Preparation and Optics Band Gap Characterization of Si-rich Silicon Nitride Thin Films

2012 ◽  
Vol 33 (6) ◽  
pp. 596-600 ◽  
Author(s):  
林娟 LIN Juan ◽  
杨培志 YANG Pei-zhi ◽  
化麒麟 HUA Qi-lin
Keyword(s):  
Thin Films ◽  
Silicon Nitride ◽  
Band Gap

Operation Characterization of Flash Memory with Silicon Nitride/Silicon Dioxide Stack Tunnel Dielectric

2005 ◽  
Vol 44 (No. 14) ◽  
pp. L435-L438 ◽  
Author(s):  
Hsiang-Yueh Lai ◽  
Kuei-Shu Chang-Liao ◽  
Tien-Ko Wang ◽  
Chao-Feng Sung
Keyword(s):  
Silicon Nitride ◽  
Silicon Dioxide ◽  
Flash Memory
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