Dynamic Actuation of Soft 3D Micromechanical Structures Using Micro-Electromechanical Systems (MEMS)
2018 ◽
Vol 3
(3)
◽
pp. 1700293
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2014 ◽
Vol 134
(3)
◽
pp. 127-127
Keyword(s):
2010 ◽
Vol 20
(12)
◽
pp. 125017
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Keyword(s):
Keyword(s):
2009 ◽
Vol 1
(1)
◽
pp. 49-56
◽