Plasma techniques in the production of customized MEMS‐applications

2019 ◽  
Vol 16 (9) ◽  
pp. 1900047 ◽  
Author(s):  
Achim Bittner ◽  
David Hochstein ◽  
Jan Rockstroh ◽  
Jan Dehnert ◽  
Frank Hedrich ◽  
...  
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Shin-ichi Kondo ◽  
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2020 ◽  
Vol 7 (4) ◽  
pp. 130-146 ◽  
Author(s):  
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Ashwani K. Misra ◽  
Chandrajit B. Majumder ◽  
Amit Arora

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