On-Line Process Control Compositional Analysis of Aluminum Films Containing a Low Percentage of Copper

1972 ◽  
pp. 539-547
Author(s):  
G. H. Glade ◽  
J. M. Matthews ◽  
F. R. Titcomb
Keyword(s):  
Process Control ◽  
Compositional Analysis ◽  
Aluminum Films ◽  
On Line ◽  
Line Process

On-Line Process Control Compositional Analysis of Aluminum Films Containing a Low Percentage of Copper

1971 ◽  
Vol 15 ◽  
pp. 539-547
Author(s):  
G. H. Glade ◽  
J. M. Matthews ◽  
F. R. Titcomb
Keyword(s):  
Process Control ◽  
Interconnection Networks ◽  
Semiconductor Device ◽  
Compositional Analysis ◽  
Aluminum Film ◽  
Portable Instrument ◽  
Aluminum Films ◽  
On Line ◽  
Line Process ◽  
Control Application

Aluminum film conducting stripes are widely used for semiconductor device interconnection networks. The addition of a low percentage of copper significantly increases their life. Composition must be controlled to maintain product quality.The paper discusses various methods used to analyze the copper composition in the aluminum films, and adaptation of one of these methods for process control application. A portable instrument designed for field use was adapted for use as an on-line instrument.

Diagnostic errors and repetitive sequential classifications in on-line process control by attributes

2010 ◽  
Vol 201 (1) ◽  
pp. 231-238 ◽  
Author(s):  
Roberto da Costa Quinino ◽  
Emerson C. Colin ◽  
Linda Lee Ho
Keyword(s):  
Process Control ◽  
Diagnostic Errors ◽  
On Line ◽  
Line Process

On-Line Process Control using Attributes with Misclassification Errors: An Economical Design for Short-Run Production

2012 ◽  
Vol 41 (10) ◽  
pp. 1813-1832 ◽  
Author(s):  
Lupércio F. Bessegato ◽  
Roberto C. Quinino ◽  
Luiz H. Duczmal ◽  
Linda Lee Ho
Keyword(s):  
Process Control ◽  
Economical Design ◽  
Misclassification Errors ◽  
Short Run ◽  
On Line ◽  
Line Process
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