scholarly journals A data bank for on-line process control

1974 ◽  
Author(s):  
A. Daneels
2010 ◽  
Vol 201 (1) ◽  
pp. 231-238 ◽  
Author(s):  
Roberto da Costa Quinino ◽  
Emerson C. Colin ◽  
Linda Lee Ho

2012 ◽  
Vol 41 (10) ◽  
pp. 1813-1832 ◽  
Author(s):  
Lupércio F. Bessegato ◽  
Roberto C. Quinino ◽  
Luiz H. Duczmal ◽  
Linda Lee Ho

1971 ◽  
Vol 15 ◽  
pp. 539-547
Author(s):  
G. H. Glade ◽  
J. M. Matthews ◽  
F. R. Titcomb

Aluminum film conducting stripes are widely used for semiconductor device interconnection networks. The addition of a low percentage of copper significantly increases their life. Composition must be controlled to maintain product quality.The paper discusses various methods used to analyze the copper composition in the aluminum films, and adaptation of one of these methods for process control application. A portable instrument designed for field use was adapted for use as an on-line instrument.


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