Physics of Glow Discharge Plasmas and Plasma/Surface Interactions During Thin Film Growth

1991 ◽  
pp. 47-71
Author(s):  
Jan-Eric Sundgren
Keyword(s):  
Thin Film ◽  
Glow Discharge ◽  
Film Growth ◽  
Surface Interactions ◽  
Thin Film Growth ◽  
Plasma Surface ◽  
Plasma Surface Interactions ◽  
Discharge Plasmas

Diagnostics for femtosecond and nanosecond laser-ablation discharge plasmas as used in thin film growth

2000 ◽  
Author(s):  
Zhiyu Zhang ◽  
Paul A. VanRompay ◽  
John A. Nees ◽  
C. A. Stewart ◽  
Xiaoqing Pan ◽  
...  
Keyword(s):  
Thin Film ◽  
Laser Ablation ◽  
Film Growth ◽  
Thin Film Growth ◽  
Nanosecond Laser ◽  
Nanosecond Laser Ablation ◽  
Discharge Plasmas

Plasma-surface interaction and surface diffusion during silicon-based thin-film growth

2005 ◽  
Vol 33 (2) ◽  
pp. 234-235 ◽  
Author(s):  
J.P.M. Hoefnagels ◽  
E. Langereis ◽  
W.M.M. Kessels ◽  
M.C.M. van de Sanden
Keyword(s):  
Thin Film ◽  
Surface Diffusion ◽  
Film Growth ◽  
Surface Interaction ◽  
Thin Film Growth ◽  
Plasma Surface ◽  
Silicon Based
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